Optical apparatus

ABSTRACT

An optical chassis includes a mount substrate an optoelectronic device on the mount substrate, a spacer substrate, and a sealer substrate. The mount substrate, the spacer substrate and the sealer substrate are vertically stacked and hermetically sealing the optoelectronic device. An external electrical contact for the optoelectronic device is provided outside the sealing. At least part of the optical chassis may be made on a wafer level. A passive optical element may be provided on the sealer substrate or on another substrate stacked and secured thereto.

CROSS-REFERENCES TO RELATED APPLICATIONS

This is a continuation application based on pending application Ser. No.10/809,914, filed Mar. 26, 2004 now U.S. Pat. No. 7,224,856, which inturn claims priority under 35 U.S.C. §119 to U.S. ProvisionalApplication Ser. No. 60/457,664 filed on Mar. 26, 2003, entitled “WaferBased Optical Chassis” and under 35 U.S.C. §120 as acontinuation-in-part to U.S. application Ser. No. 09/983,278 filed Oct.23, 2001now U.S. Pat. No. 6,798,931 , entitled “Separating of OpticalIntegrated Modules and Structures Formed Thereby,” the entire contentsof both of which are hereby incorporated by reference for all purposes.

BACKGROUND

1. Field of the Invention

The present invention is directed to a wafer based optical chassis andassociated methods. More particularly, the present invention is directedto protecting active elements in an optical system and realizingelectrical input/output without requiring separate packaging.

2. Description of Related Art

Active elements, such as optoelectronic chips, e.g., light sources fortransmitters and detectors for receivers, are typically housed in atransistor outline (TO) can. Such a TO can is typically made of metal,has a large form factor, involves an expensive serial manufacturingprocess and requires active alignment with external passive opticalelements. This large form factor separates the active element from anexternal passive optic along the optical axis, resulting in the passiveoptic needing to handle a more divergent beam, rendering the opticbigger, thereby further increasing the size of the system. Additionally,the TO can has electrical termination concerns, limiting the speed ofthe active elements.

Current trends towards miniaturization have spurred numerous small formfactor designs. Most of these designs are directed to integrating thepassive optical element with some connector, separate from the TO can.While this may reduce the length of the system and simplify themanufacturing of the passive optical portion of the system, the TO can,and the problems attendant therewith, are still present.

SUMMARY OF THE INVENTION

The present invention is therefore directed to a wafer based opticalchassis and associated methods that substantially overcome one or moreof the problems due to the limitations and disadvantages of the relatedart.

It is a feature of the present invention to protect an active elementwith an assembly including passive optical elements. It is anotherfeature of the present invention to provide efficient electricalcoupling to and from the protected active elements. It is yet anotherfeature of the present invention to provide hermetic packaging of anactive element that can at least partially be created in parallel. It isyet another feature of the present invention to provide alignment thatcompensates for variations arising in the manufacturing process.

At least one of the above and other features may be realized byproviding an optical apparatus including a mount substrate, anoptoelectronic device on the mount substrate, a spacer substrate and asealer substrate. The mount substrate, the spacer substrate and thesealer substrate are vertically stacked and hermetically seal theoptoelectronic device. The apparatus also includes external electricalcontact for the optoelectronic device outside the sealing.

An interior surface of the spacer substrate may be angled and have areflective material thereon. The electrical contact may include ametalized trench. The mount substrate and the spacer substrate may beflush. The optical apparatus as may include a ledge formed by differingwidths between the mount substrate and the spacer substrate. Themetalized trenches may be in the ledge or the electrical contact may beon the ledge. The electrical contact may include a conductive via on abottom surface of the mount substrate and a conductive structure in thevia. The conductive structure is a solder ball. The electrical contactmay include a conductive material on at least two non-parallel surfacesof the mount substrate.

A passive optical element may be on a surface of the sealer substrate.The optical apparatus may include, above the sealer substrate, anoptical block having a passive optical element on at least one surfacethereof. The optical apparatus may include, above the sealer substrate,an isolator stack including first and second polarizers and a Faradayrotator sandwiched between the first and second polarizers. The opticalapparatus may include, above the sealer substrate, another spacersubstrate. At least two of the mount substrate, the spacer substrate andthe sealer substrate are of materials with approximately samecoefficients of thermal expansion. One of the at least two substratesmay be silicon and the other may be Pyrex. A terminal surface of theoptical apparatus may include a mating feature for mating the opticalapparatus with another structure, e.g., a ferrule.

At least one of the above and other features may be realized byproviding a method of aligning an active device and a lens, includingproviding the active device on a mount substrate, the active devicehaving an active area on a side thereof, positioning an angled reflectorrelative to the active area in accordance with a radius of curvature ofthe lens, viewing the active area reflected by the angled reflector, andpositioning the lens in accordance with the viewed active area.

At least one of the above and other features may be realized byproviding a method of creating a plurality of optical apparatuses,including patterning a conductive material on a mount wafer, populatingthe mount substrate with optoelectronic devices in accordance with thepatterning, stacking and securing a spacer substrate on the mount wafer,stacking and securing a sealer substrate on the spacer substrate,wherein the stacking and securing of the spacer substrate and the sealersubstrate on the mount wafer hermetically seal the optoelectronicdevices, and vertically separating the mount wafer to form the pluralityof optical apparatuses. The vertically separating including exposing aportion of the conductive material outside the hermetic seal. Eachoptical apparatus includes a mount substrate, an optoelectronic device,a spacer substrate, a sealer substrate, and exposed conductive material.

The stacking and securing of the sealer substrate to the spacersubstrate occurs before stacking and securing of the spacer substratestacked to the mount substrate.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other features and advantages of the present inventionwill become readily apparent to those of skill in the art by describingin detail embodiments thereof with reference to the attached drawings,in which:

FIG. 1 is an elevational perspective view of an embodiment of theoptical chassis of the present invention;

FIG. 2 is a detailed elevational perspective view of the optoelectronicdevices and electrical interconnections of the optical chassis of FIG.1;

FIG. 3 is an elevational perspective exploded view of the wafercomponents to be used to create the optical chassis of FIG. 1;

FIG. 4 is an elevational perspective view of the passive optical elementwafers of FIG. 3 secured together;

FIG. 5 is an elevational perspective view of the active element wafer tobe bonded to the stack of wafers in FIG. 4 and then vertically separatedto form the optical chassis of FIG. 1;

FIG. 6 an elevational perspective view of another embodiment of theoptical chassis of the present invention;

FIG. 7 is a detailed perspective bottom view of the electricalinterconnections of the optical chassis shown in FIG. 6;

FIGS. 8 a-8 d are schematic drawings illustrating creation and use of anelectrical connection on the face of a substrate;

FIG. 9 is a schematic side view of another embodiment of electricalconnections for the optical chassis;

FIG. 10 is a schematic side view of the optical chassis with a largeroptical element bonded thereto:

FIG. 11 is a schematic side view of the optical chassis in a commonhousing with a larger optical element;

FIG. 12A is a schematic cross-section of a specific configuration of theoptical chassis of the present invention inserted in a system;

FIG. 12B is a schematic cross-section of the specific configuration ofthe optical chassis of FIG. 12A alone;

FIG. 13A is a schematic top view of alignment of the active opticalelement to the mirror;

FIG. 13B is a schematic side view of alignment of the active opticalelement to the mirror;

FIG. 14A is a schematic top view of alignment of the active opticalelement to the optics block; and

FIG. 14B is a schematic bottom view of alignment features of the opticsblock.

DETAILED DESCRIPTION OF THE INVENTION

The present invention will now be described more fully hereinafter withreference to the accompanying drawings, in which exemplary embodimentsof the invention are shown. The invention may, however, be embodied indifferent forms and should not be construed as limited to theembodiments set forth herein. Rather, these embodiments are provided sothat this disclosure will be thorough and complete, and will fullyconvey the concept of the invention to those skilled in the art. In thedrawings, the thickness of layers and regions are exaggerated forclarity. It will also be understood that when a layer is referred to asbeing “on” another layer or substrate, it may be directly on the otherlayer or substrate, or intervening layers may also be present. Further,it will be understood that when a layer is referred to as being “under”another layer, it may be directly under, or one or more interveninglayers may also be present. In addition, it will also be understood thatwhen a layer is referred to as being “between” two layers, it may be theonly layer between the two layers, or one or more intervening layers mayalso be present. Like numbers refer to like elements throughout.

FIG. 1 shows an embodiment of an optical chassis 5 of the presentinvention having four substrates. These four substrates include a mountsubstrate 10, a spacer substrate 20, a sealer substrate 30 and anoptional optics substrate 40. The mount substrate 10 serves as a mountfor optoelectronic devices, here a light source 12 and a power monitor14, and provides the electrical interconnections, here including a wirebond 16, conductive patterns 17 and metalized trenches 18. Theconductive patterns 17 each include a pad for the wire bond 16 andconnect the pad to the trench 18 for external communication. Theconductive patterns 17 may be created by patterning conductive materialon the mount substrate 10 in a known manner. The trenches 18 may becreated by removing a portion of the mount substrate 10 in aconventional manner and filling this portion with conductive material.The conductive material for the trenches 18 may be provided at the sametime the conductive patterns 17 are formed. The details of the mountsubstrate 10 can be seen more clearly in FIG. 2.

The spacer substrate 20 provides room for the beam output from the lightsource 12 to expand. If the optoelectronic device 12 does not have itsactive area on its top face, e.g., an edge emitting laser, anappropriate portion of a sidewall 22 of the spacer substrate 20 may beangled and coated with a reflective coating to appropriately direct thebeam in the optical chassis 5. A hole 24 in the spacer wafer 20 may beformed by etching a silicon wafer, producing the characteristic angledsidewall 22 from such an etch. The spacer substrate 20, in conjunctionwith the sealer substrate 30, hermetically seals and protects theoptoelectronic devices 12, 14 from the environment. The sealer substrate30 may also include an optical element on either surface thereof, e.g.,an optical element which reduces the divergence of the beam output fromthe light source 12.

The optional optics substrate 40 includes at least one optical element.Here, a diffractive optical element 44 on a first surface of the opticssubstrate 40 directs some of the light from the light source 12 to thepower monitor 14, as disclosed, for example, in commonly assigned U.S.Pat. No. 6,314,223 entitled “Diffractive Vertical Cavity SurfaceEmitting Laser Power Monitor and System.” A coupling element 42 on asecond surface of the optics substrate 40 may couple the light betweenthe optoelectronic device, here the light source 12, and furtherapplications, e.g., a fiber. Of course, more than one functionality maybe incorporated into each optical element.

If an optical element is to be provided on one or both of the surfacesof the optional optical substrate 40 or the sealer substrate 30 adjacentto one another, a separation feature 32, e.g., an indentation or standoff, may be provided on either the sealer substrate 30 or the optionaloptics substrate 40 to insure proper functioning of the optical element.The sealer substrate 30 is transparent. The sealer substrate 30 may beglass or may be some other transparent material that closely matches thecoefficient of thermal expansion of the spacer substrate 20, e.g., Pyrexwhen the spacer substrate is silicon. The smaller size of the chassis 5,e.g., roughly 2 mm by 2 mm in x and y, also helps with any thermalmismatch, since there is not a lot of strain placed in the securingjoints between the substrates.

Finally, when the optical chassis 5 is to be joined with another device,mating features may be provided on a terminal surface thereof. Forexample, if the optical chassis is to be mated with a fiber opticferule, a standoff 43 encircling the optical element 42 may be provided.The standoff 43 may be SU-8 and provides both alignment of the opticalchassis 5 with additional devices and provides separation of the opticalelement 42.

As can be seen from the profile of the optical chassis 5, a plurality ofeach of these substrates may be created on a wafer level, securedtogether with other substrates in a vertical stack, and then verticallyseparated to form a plurality of individual optical chassis 5. As shownin FIG. 3, a mount wafer 10′, a spacer wafer 20′, a sealer wafer 30′ andan optional optics wafer 40′ are to be aligned and secured together on awafer level. Each of these wafers includes a plurality of the respectivemount substrates 10, spacer substrates 20, sealer substrates 30 andoptional optical substrates 40. The top three wafers 40′, 30′ and 20′may be created completely on a wafer level in known fashions. Thesewafers may then be secured together as shown in FIG. 4 forming a securedstack wafer 50′. These wafers may be aligned and secured as set forth,for example, in U.S. Pat. No. 6,096,155 entitled “Method of Dicing WaferLevel Integrated Optical Elements.”

For the mount wafer 10′, a plurality of metalized trenches 18 forproviding the electrical interconnections may be formed on the waferlevel. The optoelectronic elements 12, 14 may then be positioned on themount wafer 10′, e.g., using pick-and-place techniques, and then wirebonded 16 to the metalized trenches 18. The metalized trenches 18 mayextend along the mount wafer 10′, so the separation of the mount wafer10′ will expose the metal on the edge of the mount substrate, as can beseen in FIGS. 1 and 2. The secured stack wafer 50′ is then secured tothe mount wafer 10′ and then vertically separated to form a plurality ofoptical chassis 5 as shown in FIG. 1. Alternatively, the secured stackwafer may be vertically separated to form secured stack substrates,which are then bonded to the mount wafer 10′.

An alternative optical chassis 55 is shown in FIGS. 6 and 7. Here, theoptional optical substrate 40 is not included. Only a diffractiveoptical element 34 for power monitoring and/or efficient coupling isprovided on the sealer substrate 30. The spacer substrate 20 is the sameas in FIG. 1. The mount substrate 60 provides different electricalconnections as in FIG. 1 for the light source 12 and the power monitor14. Here, the optoelectronic devices are again wire bonded, here toconductive pads 65. Then, on the bottom of the mount substrate 60,conductive, e.g., metalized, through holes or vias 64 and conductivestructures 62, e.g., solder balls, are used to provide the electricalinterconnections to the optical elements on the top surface of the mountsubstrate 60. These conductive structures must be large enough toobscure the hole in the mount substrate to insure the hermetic seal, toavoid creating a thermal gradient and to avoid extra oxidation. Thissolution is particularly useful if the mount substrate is a ceramic,since it is expensive to put solder on ceramic.

Another alternative for providing electrical interconnections to theoptoelectronic element on a wafer level is shown in FIGS. 8A-8D. Asshown in FIG. 8A, a saw or other etching device is used to produceV-shaped groove 81 in a wafer 80. Then, the groove 81 and the wafer 80are coated with an electrically conductive coating 82, e.g., metal, asshown in FIG. 8B. Then, the wafer 80 is separated at the V-groove 81 andat another portion to form a mount substrate 83, as shown in FIG. 8C.The groove 81 needs to be wide enough so that an angle remains afterseparation. For example, if dicing is used as the separation technique,the groove will need to be wider than the blade width of the dicing saw.

As shown in FIG. 8D, an optoelectronic device 86 is mounted on theconductive coating 82 of the mount substrate 83. A solder ball 84 orother conductive structure may then used to connect the conductivecoating 82 to an electrical connection on a board 88. The othersubstrates 20, 30 and optionally 40 may be stacked over the mountsubstrate 83 as shown in the other configurations.

Electrical input/output may also be realized as shown in FIG. 9, inwhich the substrates forming the optical chassis do not have the samewidth, thereby forming a ledge 15, with the electrical connection beingrealized on a portion of the chassis 5 providing the ledge 15. As shownin FIG. 9, the ledge 15 may be formed by having the mount substrate 10extend further in at least one direction than the adjacent spacersubstrate 20. The electrical contacts may be formed on the surface ofthe ledge or a portion of the ledge 15 may be removed to form thetrenches 18 therein to increase the surface for electrical contact.

Such a ledge may be formed by die bonding a secured stacked substratehaving the spacer substrate 20 and the sealer substrate 30 to the mountsubstrate 10. Forming such a ledge on wafer level may be realized in anumber of manners, including using dicing saws of different thicknessesand dicing through opposite surfaces, e.g., flipping the wafer afterpartial dicing, of the secured stacked wafer, including the mount wafer10′. Details of forming such a ledge on a wafer level are set forth inthe commonly assigned, co-pending application entitled “Separating ofOptical Integrated Modules and Structures Formed Thereby,” filed Oct.23, 2001, which is hereby incorporated by reference in its entirety.

If customized performance of the optical chassis is known, optionaloptical substrate(s) may be incorporated to provide the desiredperformance. Otherwise, the optical chassis of the present invention maybe used to simply replace the conventional TO-can element and can havethe conventional optics aligned thereto, as is currently done for theTO-can optoelectronics. Two manners of achieving this are shown in shownin FIGS. 10 and 11. As shown in FIG. 10, the vertically integratedoptical chassis 55 of the present invention may have an optical element90, including optical elements larger in the x- and/or y-direction thanthe optical chassis 55, die-bonded thereto. As shown in FIG. 11, theoptical element 90 may be separate from but aligned with the opticalchassis 55, here shown in a common housing 92. This separation reducesthe alignment tolerances for the optical element 90. The sealersubstrate 30 may still include optics thereon for improving the lightfrom the light source 12, e.g., collimating or at least reducing thedivergence of the light.

A specific configuration of an optical chassis in accordance with thepresent invention is shown in FIGS. 12A-12B. As can be seen therein, anoptical chassis 100 is attached to a flex lead 150, inserted into amagnet 160, on which a fiber stop 170 and then a fiber sleeve 180 issecured. This structure may be provided on a heat sink.

The optical chassis 100 includes a mount substrate 110 having a ledge115, a spacer substrate 120 and a sealer substrate 130. Anoptoelectronic device 112 and wire bonds 116 are on the mount substrate110. The sealer substrate 130 includes a lens 132 and an angled,reflective sidewall 122. The angled, reflective sidewall 122 serves as amirror to direct light between the optoelectronic device 112 and thefiber in the fiber sleeve 180. If the active area or facet of theoptoelectronic device is not on an edge thereof, this angled, reflectivesidewall 122 is not needed.

An additional spacer substrate 136, which may include additional spacingstructures 138, separates the lens 132 from an isolator stack 140. Thespacing structures 138 are used when a passive optical element is on oneor more opposing surfaces in the stack and the surfaces would otherwisecontact the passive optical element. The spacing structures may beintegral with the surface or may be provided on the surface.Alternatively, these spacing structures may be on the sealer substrate130. The electrical connection of the optoelectronic device 116 isrealized using the ledge 115, as discussed in connection with FIG. 9.

The isolator stack 140 includes a first polarizer 142, a Faraday rotator144 and a second polarizer 146. The magnet 170, which may be a ringmagnet, surrounds the isolator stack 140 when the optical chassis 100 isinserted as shown in FIG. 12A, thereby completing the isolator. If theFaraday rotator 144 is a latching type, then the separate magnet 170 isnot needed.

In any of the above configurations, the active elements are secured tothe mount substrate such that they remain secured and withstandsubsequent processing, e.g., the securing of the substrate. Theconstruction of the optical chassis of the present invention needs to bedetermined in an appropriate order, with the least robust techniquebeing performed last. The materials used for the securing of the activeelements, realizing the electrical connections and the securing of thesubstrates must be selected in accordance with the required order. Forexample, the active elements may be secured on the mount substrate usinga gold-tin (AuSn) solder and the substrates may then be secured using amaterial with a lower melting point, e.g., silver-tin (AgSn) solder.

Techniques for realizing alignment of the optical elements in theoptical chassis are shown in FIGS. 13A-14B. In making micro-opticalelements, there are inevitable variations in characteristics, e.g., lensthickness, radius of curvature (ROC), of individual elements. Byclassifying these lenses by their ROC into different groups within arange, e.g., ±1%, the variation in ROC may be compensated for with theplacement of the angled surface 122 of the spacer substrate 120, asshown in FIGS. 13A-13B. Once a lens is selected for a particularoptoelectronic device 112 on the mount substrate 110, the separation dbetween the optoelectronic device 112 and a back edge of the angledsurface 122 is determined in accordance with the ROC of the lens to beused. If the angled surface 122 has an angle of approximately 45°, thisdistance d will be roughly equal to the height of the spacer substrate120. Thus, this aligning of the optoelectronic device 112 with theangled surface 122 compensates for any variations in the thickness ofthe spacer substrate 120, as well as taking the ROC of the lens intoaccount.

The aligning of the lens to the optoelectronic device 112 is shown inFIGS. 14A-14B. Here, the image of the active area of the optoelectronicdevice 112 in the reflective angled surface 122 may be used to align thelens. A bottom surface of the substrate having the lens thereon, whichmay be the sealer substrate 130 as shown in FIGS. 12A-12B, includesalignment features 134, here in the form of a crosshair centered on thelens on the top surface of the substrate. The alignment features 134 arethen centered with the image of the active area of the optoelectronicdevice 112 as reflected by the angled surface 122 to insure properalignment there between. Since the height of the optoelectronic elementchanges its location on the angled surface 122, by aligning the lens tothe reflection from the angled surface 122, variations in the height ofthe optoelectronic element may be compensated for as well.

If the active area of the optoelectronic device 112 is not on a sidethereof, the lens may be aligned by directly viewing the active areausing alignment features 134. The variation in height of suchoptoelectronic devices, i.e., in the z-direction, do not significantlyaffect the performance. If there are no optical elements on the sealersubstrate 130, the alignment thereof is not critical. Since the sealersubstrate 130 is transparent, alignment features do not need to beprovided thereon, as alignment features on surfaces below the sealersubstrate may be viewed through it. If there are optical elements onother substrates, and the sealer substrate 130 is transparent, the samealignment techniques may be employed.

Thus, in accordance with the present invention, an optical chassishaving a small form factor may be created at least partially on a waferlevel, including electrical interconnections. The optical chassis of thepresent invention also provides a hermetic seal without requiring a TOcan or other separate housing. Further, since substrates of the opticalchassis are secured to one another, rather than to a carrier as in a TOcan, better alignment can be maintained for longer.

While the present invention is described herein with reference toillustrative embodiments for particular applications, it should beunderstood that the present invention is not limited thereto. Thosehaving ordinary skill in the art and access to the teachings providedherein will recognize additional modifications, applications, andembodiments within the scope thereof and additional fields in which theinvention would be of significant utility without undue experimentation.For example, any of the electrical interconnections shown may be usedwith any optical chassis embodiments. Further, additional opticalsubstrates or elements as needed may be secured to the optical chassis.Finally, any of the configurations of the optical chassis may be createdat least partially on a wafer level as discussed regarding FIGS. 3-5.

1. An optical apparatus, comprising: a mount substrate; anoptoelectronic device on the mount substrate; a spacer on the mountsubstrate, the spacer including a hole exposing the optoelectronicdevice; a cover on the spacer, the cover covering the hole, at least twoof the mount substrate, the spacer and the cover together sealing theoptoelectronic device; and a metalized trench in the mount substrate,the metalized trench extending from the optoelectronic device to an edgeof the mount substrate, a cross-section of the metalized trench at theedge of the mount substrate being exposed.
 2. The optical apparatus asclaimed in claim 1, wherein the mount substrate and the spacer arehorizontally co-extensive.
 3. The optical apparatus as claimed in claim1, further comprising a ledge formed in the mount substrate extendingbeyond the spacer substrate, the metalized trench being in the ledge. 4.The optical apparatus as claimed in claim 1, wherein the metalizedtrench is wider near the edge of the mount substrate and near theoptoelectronic device than between the edge and the optoelectronicdevice.
 5. An optical apparatus, comprising: a mount substrate; anoptoelectronic device on the mount substrate; a spacer on the mountsubstrate, the spacer including a hole exposing the optoelectronicdevice; a cover on the spacer, the cover covering the hole, at least twoof the mount substrate, the spacer and the cover together sealing theoptoelectronic device; a via extending through a bottom surface of themount substrate, sidewalls of the via being conductive, sidewalls of thevia being electrically connected to the optoelectronic device; and aconductive structure in the via, the conductive structure contacting thesidewalls of the via.
 6. The optical apparatus as claimed in claim 5,wherein the conductive structure includes a solder ball.
 7. An opticalapparatus, comprising: a mount substrate; an optoelectronic device onthe mount substrate; a spacer on the mount substrate, the spacerincluding a hole exposing the optoelectronic device; a cover on thespacer, the cover covering the hole, at least two of the mountsubstrate, the spacer and the cover together sealing the optoelectronicdevice; a conductive material on the mount substrate and extending alongat least two adjacent surfaces of the mount substrate, the conductivematerial being electrically connected to the optoelectronic device,wherein a first surface of the at least two adjacent surfaces is asurface on which the optoelectronic device is mounted and a secondsurface of the at least two adjacent surfaces is not orthogonal to thefirst surface.
 8. The optical apparatus as claimed in claim 7, whereinthe mount substrate is ceramic.
 9. The optical apparatus as claimed inclaim 7, further comprising a passive optical element on a terminalsurface of the optical apparatus.
 10. The optical apparatus as claimedin claim 7, further comprising a passive alignment feature on a terminalsurface of the optical apparatus.
 11. The optical apparatus as claimedin claim 7, wherein the cover has a planar surface facing theoptoelectronic device.
 12. The optical apparatus as claimed in claim 11,further comprising a passive optical element on a surface of the coveropposite the planar surface.
 13. An optical apparatus, comprising: amount substrate; an optoelectronic device on the mount substrate; aspacer on the mount substrate, the spacer including a hole exposing theoptoelectronic device; a cover on the spacer, the cover covering thehole, at least two of the mount substrate, the spacer and the covertogether sealing the optoelectronic device; a via extending through abottom surface of the mount substrate, sidewalls of the via beingconductive, sidewalls of the via being electrically coupled to theoptoelectronic device and a conductive structure electrically coupled tothe conductive sidewalls of the via.
 14. The optical apparatus asclaimed in claim 13, wherein the conductive structure includes a solderball.